Journal of Micro/Nanopatterning, Materials, and Metrology
Academic journal
From Wikipedia, the free encyclopedia
Journal of Micro/Nanopatterning, Materials, and Metrology is a peer-reviewed scientific journal published quarterly by SPIE. It covers science, development, and practice of micro and nanofabrication processes and metrology.[1] Established in 2002 under the name Journal of Microlithography, Microfabrication, and Microsystems, it was subsequently retitled to Journal of Micro/Nanolithography, MEMS, and MOEMS in 2007. The journal title was changed to its current name in 2021.[2]
DisciplineMicrolithography, nanolithography, metrology
LanguageEnglish
EditedbyHarry Levinson
Former names
- Journal of Microlithography, Microfabrication, and Microsystems (2002–2006)
- Journal of Micro/Nanolithography, MEMS, and MOEMS (2007–2020)
| Discipline | Microlithography, nanolithography, metrology |
|---|---|
| Language | English |
| Edited by | Harry Levinson |
| Publication details | |
Former names |
|
| History | 2002–present |
| Publisher | |
| Frequency | Quarterly |
| 3.4 (2023) | |
| Standard abbreviations | |
| ISO 4 | J. Micro/Nanopatterning Mater. Metrol. |
| Indexing | |
| CODEN | JMMMIH |
| ISSN | 1932-5150 (print) 2708-8340 (web) |
| OCLC no. | 1249108189 |
| Links | |
The editor-in-chief of the journal is Harry Levinson (HJL Lithography).[1]
Abstracting and indexing
The journal is abstracted and indexed in:
- Current Contents/Electronics & Telecommunications Collection[3]
- Current Contents/Engineering, Computing & Technology[3]
- Current Contents/Physical, Chemical & Earth Sciences[3]
- EBSCO databases[4]
- Ei Compendex[5]
- Inspec[6]
- Science Citation Index Expanded[3]
- Scopus[7]
According to the Journal Citation Reports, the journal has a 2023 impact factor of 3.4.[8]