User:Shinkansen Fan/Sandbox

Origins

On November 11, 1963, Tokyo Electron Laboratories Incorporated was founded by Tokuo Kubo and Toshio Kodaka, largely funded by Tokyo Broadcasting System (TBS), with a capital of over five million yen. Later that year, their office opened in the TBS main building and began manufacturing thousands of quality-control and importing diffusion furnaces made by Thermco and selling Japanese-made car radios.^[4]

In 1965, the company approached a rapidly growing business in the market, Fairchild Semiconductor Corporation, and agreed to serve as a sales agency for them, increasing their capital to twenty million yen and began exporting IC testers, IC sockets, IC connectors, and other similar computer components.^[4]

They opened a new office in San Francisco, California and their new branch, Pan Electron in 1968 establishing themselves as the only stocking distributor of imported electronic components in the region.^[4]

One year later, they opened their still-functioning Yokohama office and established Teltron, a major manufacturer and distributor of car stereos, expanding their headquarters to fill the entire TBS-2 building and raising their capital to 100 million yen.^[4]

Shift to manufacturing

Expansion

Globalization

Recent developments

Semiconductor production equipment (SPE)

TEL produces SPE for the following purposes: ^[2]

Thermal processing

Deposition of thin layers of dielectric material between transistors onto the silicon wafer surface in a heated low-pressure chemical vapor deposition (LPCVD) or oxidation process^[5]

Photoresist coating/developing

Photoresist coating and developing to project a microscopic circuitry pattern on the wafer inphotolithography^[6]

Plasma etching^[7]

Dielectric Etch System, Silicon Etch System

Cleaning

Wafer surface cleaning to remove foreign particles or contaminants such as dust^[8]

auto wet station, single wafer cleaning system, pre-clean system, scrubber system

Single wafer chemical vapor deposition

Deposition of thin layers of various materials, such as tungsten, tungsten silicide, titanium,titanium nitride, and tantalum oxide^[9]

Wafer probing

Wafer probers for testing the functionality and performance of each die on the wafer^[10]

Material modification/doping

Surface modification and doping using gas cluster ion beam (GCIB) technology^[11]

Corrective etching/trimming

Corrective etching and trimming of thin films such as silicon, silicon nitride, silicon dioxide, aluminium nitride, and metals^[12]

Integrated metrology^[13]

(co-developed by TEL and KLA Tencor)

In particular, TEL leads the markets of photoresist coater/developers and thermal processing systems.^[1]

FPD/PV production equipment

FPD photoresist coater/developing

FPD plasma etching/plasma ashing

Plasma CVD for thin-film solar cells

End-to-end thin-film solar cell solutions

TEL is the sole Asia/Oceania representative of Oerlikon Solar, a Swiss manufacturer of thin-film solar cells.^[1]

Electronic components and computer networks

Tokyo Electron Device (TED) handles this product category.

Semiconductor products

Other electronic components

Networking devices

Software

Management

Divisions

Consolidated subsidiaries

The Tokyo Electron Group consists of TEL, TED, Oerlikon Solar, and the other consolidated subsidiaries. ^[1]

Japan

TEL's Technology Development Center and Leading-edge Process Development Center is located in Nirasaki, Yamanashi. TEL also has the Kansai Technology Center in Amagasaki, Hyogo Prefecture and the Sendai Design and Development Center in Sendai, Miyagi Prefecture. Tokyo Electron Technology Development Institute TEL Technology Center, Tsukuba

Korea

Process Technology Center Tokyo Electron Korea Solution

Taiwan

TEL Technology Center, Taiwan

United States

TEL Technology Center, America, LLC in Albany, New York is the R&D center in the United States.

SEMATECH in Albany, New York

Belgium

TEL is one of the partners of IMEC, a microelectronics and nanoelectronics research center in Leuven, Belgium.^[1]