Microoptomechanical systems
Micro-systems which use optical and mechanical, but not electronic components
From Wikipedia, the free encyclopedia
Microoptomechanical systems (MOMS), also written as micro-optomechanical systems, are a special class of microelectromechanical systems (MEMS) which use optical and mechanical, but not electronic components.[1]
See also
- Microoptoelectromechanical systems (MOEMS)
- Nanoelectromechanical systems (NEMS)
