Multibeam Corporation
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| Industry | Semiconductor industry |
|---|---|
| Founded | 2010 |
| Headquarters | Santa Clara, California |
Key people | David K. Lam (Chairman) |
| Products | E-beam lithography systems for the semiconductor industry |
| Website | http://www.multibeamcorp.com |
Multibeam is an American corporation that engages in the design, manufacture, and sale of semiconductor processing equipment used in the fabrication of integrated circuits. Headquartered in Santa Clara, in the Silicon Valley, Multibeam is led by Dr. David K. Lam, the founder and first CEO of Lam Research. Multibeam Corporation is a member of the eBeam Initiative.
Multibeam shipped its first MEBL platform to SkyWater Technology, in Bloomington, Minnesota, in July 2024.[1]
Technology
Multibeam developed miniature, all-electrostatic columns for e-beam lithography, that provide a maskless and high throughput platform for writing nanoscale IC patterns seamlessly across full wafers. Arrays of e-beam columns operate simultaneously and in parallel to increase wafer processing speed. With over 35 patents issued,[2] these multi-column e-beam lithography (MEBL) systems enable an array of direct write lithography applications, including Complementary E-Beam Lithography (CEBL), Secure Chip ID, Advanced Packaging Interposers, Photonics, and other applications where precise, nanometer-scale features are required.[2]