SECS-II

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In semiconductor manufacturing, The SECS-II (SEMI Equipment Communications Standard, Part 2), defined as SEMI E5, is a communication protocol maintained by the Semiconductor Equipment and Materials International (SEMI) trade association. While lower-level standards such as SECS-I (SEMI E4) or HSMS (SEMI E37) define how messages are transmitted (over RS-232 or TCP/IP), SECS-II defines message structure, data elements used, expected responses, and exception handling.[1]

Messages

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