Trichlorofluorosilane

Trichlorofluorosilane
Names
	Systematic IUPAC name Trichloro(fluoro)silane
	Other names Silicon trichloride fluoride
Identifiers
CAS Number	14965-52-7 ;
3D model (JSmol)	Interactive image;
ChemSpider	123347;
PubChem CID	139862;
CompTox Dashboard (EPA)	DTXSID30164361 ;
	InChI InChI=1S/Cl3FSi/c1-5(2,3)4 Key: PGHWHQUVLXTFLZ-UHFFFAOYSA-N;
	SMILES F[Si](Cl)(Cl)Cl;
Properties
Chemical formula	SiCl3F
Molar mass	153.43 g/mol
Density	1.477g/cm3
	Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa). Infobox references

Trichlorofluorosilane (Silicon trichloride fluoride) is an inorganic compound. It is used to produce silicon for use in the manufacturing of semiconductor and fiber optic materials.^[1]

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